Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope.
نویسندگان
چکیده
In this research, chromatic confocal microscopy with transverse point beam scanning is constructed for three-dimensional surface measurement without longitudinal mechanical translation. In beam scanning chromatic confocal microscopy, the wavelength-to-depth relation and the lateral field of view should be determined considering the beam scanning angle. With the experimental results from a sample structure, the three-dimensional profile is reconstructed by relating the wavelength and scanning angle to the axial and the lateral coordinates.
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ورودعنوان ژورنال:
- The Review of scientific instruments
دوره 80 7 شماره
صفحات -
تاریخ انتشار 2009